| Material |
- Body/Bonnet: ASTM A182 F316L (low-carbon stainless steel)
- Features: Excellent corrosion resistance, low magnetic permeability, and high purity suitable for ultra-high-purity (UHP) gas systems.
- Surface treatment: Electropolished (Ra ≤ 0.2μm) to minimize particle retention and outgassing. |
| Purity Level |
- Meets semiconductor industry standards (e.g., SEMI G45, ASTM G93):
- Total hydrocarbon (THC) ≤ 1 ppb
- Moisture ≤ 1 ppb
- Particulate (≥ 0.2μm) ≤ 1 particle/100 mL
- Metal impurities ≤ 1 ppb (each). |
| Design Features |
- Needle Valve Type: Straight-through or angle pattern with precision-machined needle tip and seat for fine flow control.
- Sealing Mechanism: Soft-seal (PTFE/Vespel®) or metal-to-metal seal (for high-temperature/high-pressure applications).
- Bonnet Design: Bubble-tight stem seal (double O-ring or bellows seal options for zero leakage).
- Connection Types: -compatible tube fittings, VCR® face seals, ISO-K flanges, or NPT threads (polished for UHP use). |
| Operating Conditions |
- Pressure Range:
- Vacuum to 6000 psi (413 bar) (depending on model).
- Temperature Range: -40°C to 150°C (PTFE seal); up to 450°C (metal seal).
- Flow Control: Turndown ratio ≥ 100:1 for precise metering of micro-flow rates (e.g., 0.1 sccm to 500 slm). |
| Industry Standards |
- Compliant with:
- ASME B16.34 (valve design)
- ISO 14644-1 (cleanroom manufacturing)
- NACE MR0175 (corrosion resistance for sour gas applications)
- USP Class VI (biocompatibility for pharmaceutical gases). |
| Applications |
- Semiconductor manufacturing (e.g., CVD, etch, PVD processes with gases like Nitrogen TrifluoridSiH).
- Analytical instruments (gas chromatography, mass spectrometry ).
- High-purity gas distribution systems (UHP Nitrogen, Oxygen, He).
- Pharmaceutical and biotech (sterile gas handling).
- Aerospace (cryogenic gas control, e.g., LOX, ). |
| Testing & Certification |
- Leak Testing:
- Helium mass spectrometer leak test: ≤ 1×10¹ atm·cc/s (bubble-tight).
- Air pressure test: 1.5× working pressure for 30 minutes.
- Cleanliness: Certified cleanroom-washed (ISO Class 5/Class 100) and bagged in polypropylene film.
- Documentation: Material traceability report, cleanliness certificate, pressure test report, and RoHS/REACH compliance. |
| Unique Selling Points (USPs) |
- Ultra-Low Outgassing: Suitable for ultra-high-vacuum (UHV) systems (<10 Torr).
- Particle-Free Flow Path: Electropolished internals reduce surface roughness and particle shedding.
- High Cycle Life: Rated for ≥50,000 cycles without performance degradation.
- Customization: Available with exotic alloys or special coatings (e.g., PFA lining) for aggressive gases. |
| Standards Compliance |
- CE marked (ATEX for explosive gas environments).
- FDA-compliant (for food/medical gases).
- GB/T 12241-2005 (valve pressure test methods). |
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